Method for forming an encapsulated device and structure

ABSTRACT

In one embodiment, an electronic device package ( 1 ) includes a leadframe ( 2 ) with a flag ( 3 ). An electronic chip ( 8 ) is attached to the flag ( 3 ) with a die attach layer ( 9 ). A trench ( 16 ) having curved sidewalls is formed in the flag ( 3 ) in proximity to the electronic chip ( 8 ) and surrounds the periphery of the chip ( 8 ). An encapsulating layer ( 19 ) covers the chip ( 8 ), portions of the flag ( 3 ), and at least a portion of the curved trench ( 16 ). The curved trench ( 16 ) reduces the spread of die attach material across the flag ( 3 ) during chip attachment, which reduces chip and package cracking problems, and improves the adhesion of encapsulating layer ( 19 ). The shape of the curved trench ( 16 ) prevents flow of die attach material into the curved trench ( 16 ), which allows the encapsulating layer ( 19 ) to adhere to the surface of the curved trench ( 16 ).

BACKGROUND OF THE INVENTION

This invention relates generally to electronic devices, and morespecifically to a support substrate structure and method for forming anencapsulated electronic device.

Semiconductor chips typically are encapsulated within a device packageprior to their installation into an electronic system. Leadlesspackaging is one type of chip packaging technology that has gained inpopularity in recent years. Compared to other types of electronicpackages, leadless packages have a smaller footprint and thinnerprofile. This makes leadless packages ideal for wireless, networking andother consumer electronic applications where tight space requirementsare important.

Leadless packaging is typically based on traditional wire bonding andleadframe processes, which enables a very attractive cost structurecompared to other small outline packages. By eliminating external leads,a package footprint is decreased by approximately one quarter to onehalf compared to similar leaded surface mount packages. Additionally,the die attach pad of a leadless package can be coupled directly to anext level of assembly such as a printed circuit board, which providesenhanced thermal performance.

There are several problems with current leadless packaging techniquesthat impact overall device performance. In a typical leadless packagingprocess flow, a semiconductor chip is attached to a metal leadframeusing a solder die attach technique. When heated during the process, thedie attach material spreads or flows out from beneath the chip acrossthe leadframe. This can result in the chip tilting or rotating off ofits desired location on the leadframe. When the chip tilts, regions ofstress are localized in areas where the die attach material thickness isthin, which can lead to chip cracking. When a chip rotates off itsdesired location, alignment problems can occur during subsequent wirebond processing. Additionally, typical mold compounds or encapsulatingmaterials do not adhere well to die attach materials, which can lead topackage delamination, chip cracks, package cracks, or die attach cracks.This forces manufacturers to use smaller chips on a given leadframe toensure sufficient bonding surface area for encapsulating material toadhere to, which is an insufficient use of space.

Accordingly, a need exists for low-cost methods and structures thatreduce the spreading of die attach materials in electronic packagingprocesses and improve overall device performance and reliability.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates, an enlarged cross-sectional view of an electronicdevice package according to the present invention;

FIG. 2 illustrates, a top view of a portion of the structure shown inFIG. 1;

FIG. 3 illustrates, an enlarged cross-sectional view of an embodiment ofthe present invention;

FIG. 4 illustrates, an enlarged cross-sectional view of anotherembodiment of the present invention;

FIG. 5 illustrates, an enlarged cross-sectional view of a furtherembodiment of the present invention;

FIG. 6 illustrates, an enlarged partial cross-sectional view of anadditional embodiment of an electronic device package according to thepresent invention;

FIG. 7 illustrates an enlarged cross-sectional view of anotherembodiment of an electronic device package according to the presentinvention;

FIG. 8 illustrates a top view of the embodiment of FIG. 7;

FIG. 9 illustrates an enlarged partial cross-sectional view of analternative embodiment of an electronic device package according to thepresent invention

FIG. 10 is a top view including the embodiment of FIG. 9;

FIG. 11 is a top view of another embodiment of the structure shown inFIG. 9;

FIG. 12 illustrates an enlarged cross-sectional view of a supportsubstrate according to the present invention at an early stage offabrication; and

FIG. 13 illustrates an enlarged cross-sectional view of supportsubstrate of FIG. 12 at a further stage of fabrication.

DETAILED DESCRIPTION OF THE DRAWINGS

In general, the present invention pertains to electronic device packageshaving an electronic chip or chips attached to a support substrate orleadframe with a die attach material. More specifically, the presentinvention includes a support substrate with a flag and a bondingsurface. An electronic chip is attached to the bonding surface with adie attach material. A continuous trench is formed in the bondingsurface of the flag in proximity to the electronic chip and surrounds atfifty percent of the chip's peripheral edge. The continuous trench hascurved sidewall surfaces. In a preferred embodiment, the trenchsurrounds the entire periphery of the electronic chip.

The location and shape of the trench controls the flow of die attachmaterial from beneath the electronic chip thereby reducing the spread ofmaterial across the support substrate. This allows larger chips to beplaced on a given flag area, and further allows chips to be placedcloser together in multi-chip package applications. The shape provides asurface tension effect that minimizes or substantially eliminates theflow of die attach material into the trench itself (i.e., the flow ofdie attach material is impeded or stopped at about the inner edge of thetrench). This provides a self-alignment feature that properly aligns ororients the electronic chip appropriately or uniformly (i.e.,substantially equidistant spacing between the edges of the electronicchip and the trench) on the flag area. The shape also allowsencapsulating material to flow into the trench during a molding step toprovide a mold lock feature. Additionally, this provides more substratesurface area for the encapsulating material to adhere to therebyreducing delamination problems. Moreover, this provides a moisturebarrier and reduces stresses associated with batch electronic packagingprocesses.

The present invention is better understood by referring to FIGS. 1-13together with the following detailed description. For ease ofunderstanding, like elements or regions are labeled the same throughoutthe detailed description and FIGURES where appropriate. The preferredembodiments are shown using a leadless type package, but the presentinvention is applicable to other forms of electronic packaging wheresupport substrates and die attach materials are used.

FIG. 1 shows an enlarged cross-section view of an electronic devicepackage or leadless electronic structure 1 according to the presentinvention. Structure 1 includes a support substrate, conductivesubstrate, or leadframe 2, which includes a flag or flag portion 3 and abond pad, bond site, or bonding site 4. Flag 3 includes a bonding orattaching surface 6. Support substrate 2 comprises, for example, copper,a copper alloy (e.g., TOMAC 4, TAMAC 5, 2ZFROFC, or CDA194), a copperplated iron/nickel alloy (e.g., copper plated Alloy 42), or a likeconductive material. Alternatively, support substrate 2 comprises aninsulator or includes an insulative layer formed on a portion of or overflag 3.

Structure 1 further includes an electronic chip or device 8 attached orbonded to bonding surface 6 with a die or chip attach layer or material9. Electronic chip 8 includes, for example, a bond pad 11 formed on anupper or exposed surface 12. Electronic chip 8 further includes aperipheral or outer edge 13 that defines the outer periphery ofelectronic chip 8. Electronic chip 8 comprises a semiconductor device,an optical device, an electromechanical sensor device, a passive device,or the like. Die attach layer 9 comprises a eutectic solder, a bondingpaste, a bonding epoxy, a pre-form film, a polyimide film, a metalfilled glass, or the like. In a preferred embodiment, die attach layer 9comprises a lead/tin/silver solder material. Alternatively, die attachlayer 9 comprises an insulating material when it is desired to isolateelectronic chip 8 from flag 3.

According to the present invention, structure 1 further includes atrench, continuous groove, continuous trench, continuous channel oretched trench 16 formed in bonding surface 6 of flag 3 in proximity orspaced relationship to peripheral edge 13 of electronic chip 8.Continuous trench 16 includes a curved sidewall, side, or etchedsidewall surface 17 adjacent to peripheral edge 13. Preferably, allsidewalls of continuous trench 16 are curved.

In a preferred embodiment, continuous trench 16 has a continuouslycurved or rounded or a substantially continuously curved cross-sectionalshape or inner surface. Preferably, continuous trench 16 comprises aninverse “omega” like cross-sectional shape. By way of example, trench 16has a depth 21 of at least about 76 microns (about 3 mils). Preferably,depth 21 is in range from about 100 microns (about 4 mils) to about 330microns (about 13 mils).

As shown in FIG. 1, electronic device package 1 further includes abonding device 18 that couples or electrically connects bond pad 11 tobonding site 4. Bonding device 18 comprises for example, a bond wire orclip. An encapsulant, molded layer, protective layer, or encapsulatinglayer 19 covers, encloses, or encapsulates electronic chip 8, exposedportions of flag 6, bonding site 4, and at least a portion of curvedsidewall surfaces 17. Preferably, encapsulating layer 19 coverssubstantially all of or the entire inner surface of continuous trench16. Encapsulating layer 19 comprises, for example, an epoxy-novolacbased resin material

Trench 16 is continuous in that there are no breaks or terminations fora specific distance. Preferably, the specific distance is along at leastfifty percent of the peripheral length (e.g., two sides and at least onecorner of a rectangular shaped chip) of electronic chip 8. In a morepreferred embodiment, continuous trench 16 surrounds electronic chip 8without a break or termination as shown in FIG. 2, which is a top viewof a portion of structure 1. Additionally, trench 16 preferably hasrounded corners 14 as shown in FIG. 2, and a width 22 of at least about50 microns (about 2 mils). Preferably, width 22 is in a range from about102 microns (about 4 mils) to about 330 microns (about 13 mils).

The curved shape or contour of continuous trench 16 and its proximity toperipheral edge 13 provide several advantages. First, when electronicchip 8 is attached to bonding surface 6 with die attach material 9,continuous trench 16 prevents or restricts die attach material 9 fromspreading or flowing across flag 3. By restricting the flow of dieattach material, the thickness of die attach layer 9 is more uniform,which reduces die tilt problems and associated die cracking problems.Also, it allows manufacturers to use a thicker die attach layer, whichalso reduces package related stresses. In addition, continuous trench 16allows manufacturers to use a larger chip on a given flag because therestricted flow effect leaves sufficient exposed bonding surface 6 forencapsulating layer 19 to adhere to. This provides a more efficient useof space and allows manufacturers to either shrink package size, orplace larger chips in a given package size.

In particular, the shape of continuous trench 16 and its proximity toelectronic chip 8 provide or create a surface tension effect thatprevents or impedes die attach material 9 from spreading, flowing, ormigrating beyond an inner edge of continuous trench 16 (shown as inneredge 24 in FIGS. 3-5). In other words, the surface tension effectreduces or prevents die attach material 9 from flowing or spreading intocontinuous trench 16 so that a leading edge or at least a portion of dieattach material terminates at approximately the inner edge of continuoustrench 16. As a result, trench 16 is substantially absent die attachmaterial, which allows encapsulating layer 19 to fill continuous trench16 to provide a mold lock. This enhances the adhesion of encapsulatinglayer 19 to flag 3, and further provides a moisture barrier to betterprotect electronic chip 8.

Continuous trench 16 solves another problem associated with the priorart. In particular, when encapsulating layer 19 comprises certain moldcompounds having a high shrinkage rate, the different thermal expansioncharacteristics of support substrate 2 and encapsulating layer 19 resultin an assembly that bows or warps in a concave-up manner. This impactssubsequent package separation processes making it difficult to saw ordice the assembly into individual packages. With encapsulating layerfilling continuous trench 16, support substrate 2 becomes more of acomposite structure thereby reducing the stress-induced bowing problem.This benefit also allows manufacturers to use higher shrinkageencapsulating materials than in the prior art, which improves adhesionbetween the encapsulating material and the support substrate. This inturn improves package reliability.

FIGS. 3-5 show enlarged cross-sectional views of alternative embodimentsof a portion of electronic device package 1. In FIG. 3, peripheral edge13 of electronic chip 8 is shown substantially aligned to an inner edge24 of continuous trench 16. In FIG. 4, peripheral edge 13 of electronicchip 8 extends over inner edge 24 of continuous trench 16. In FIG. 5,peripheral edge 13 of electronic chip 8 is spaced a distance 26 from orinside inner edge 24. Preferably, distance 26 is less than or equal toabout 635 microns (less than or equal to about 25 mils). Distance 26 isvaried depending on electronic chip size and/or a desired volume oramount of die attach material needed for a selected flag geometry.According to the present invention, distance 26 is proximate to theelectronic chip so that the flow of die attach material substantiallyterminates at the edge of the trench due to the surface tension effect.This provides the self-alignment and anti-tilt features and the otherbenefits of the present invention.

Turning now to FIGS. 6-9, a multi-chip embodiment according to thepresent invention is described. FIG. 6 shows an enlarged cross-sectionalview of a portion of an electronic device package 31, which includes asupport substrate or leadframe 33 (partially shown) having a flagportion or flag 34. A first electronic chip 37 is attached to a bondingsurface 36 of flag 34 with a die attach layer 38. A second electronicchip 39 is attached on a different portion of bonding surface 36 with adie attach layer 41. An encapsulating layer 42 covers electronic chips37 and 39, portions of die attach layers 38 and 41, portions of bondingsurface 36 and continuous trenches 43 and 47, which are described next.

According to the present invention, electronic device package 31 furtherincludes a first continuous trench, trench, or groove 43 formed inbonding surface 36 in proximity to first electronic chip 37 and dieattach layer 38. Preferably, first continuous trench 43 surrounds atleast fifty percent of the periphery of first electronic chip 37. In apreferred embodiment, first continuous trench 43 surrounds theperipheral edge of first electronic chip

A second continuous trench or groove 47 is formed in bonding surface 36in proximity to second electronic chip 39 and die attach layer 41.Preferably, second continuous trench 47 surrounds at least fifty percentof the periphery of second electronic chip 39. In a preferredembodiment, second continuous trench 47 surrounds the peripheral edge ofsecond electronic chip 39.

First and second continuous trenches 43 and 47 have curved sidewall,side, or etched sidewall surfaces 44 and 48 respectively. Preferably,continuous trenches 43 and 47 have substantially continuously curvedinner surfaces. In a preferred embodiment, both continuous trenches 43and 47 have rounded corners as shown as element 14 in FIG. 2 withcontinuous trench 16. Additionally, continuous trenches 43 and 47preferably have the same depth and width characteristics as thosedescribed for trench 16.

By incorporating continuous trenches 43 and 47, the benefits describedwith continuous trench 16 are realized. In addition, continuous trenches43 and 47 allow manufacturers to place multiple devices such aselectronic chips 37 and 39 closer together on flag 34.

FIG. 7 shows an enlarged partial cross-sectional view of anotherembodiment of electronic device package 61 according to the presentinvention. Electronic device package 61 includes a support substrate orleadframe 63 (partially shown in FIG. 7) having a flag or flag portion64, which has bonding surface portions 76 and 77. A first electronicchip 67 is attached to bonding surface portion 76 with a die attachlayer 68. A second electronic chip 69 is attached to bonding surfaceportion 77 with a die attach layer 71. An encapsulating layer 72 coverselectronic chips 67 and 69, portions of die attach layers 68 and 71, andcontinuous trenches 81, 84, and 86, which are described next.

Referring now to FIG. 8, which is a top view of a portion electronicdevice 61. Electronic device package 61 further includes a firstcontinuous trench 81 that is formed in bonding surface portion 76 inproximity to the periphery of first electronic chip 67, and a secondcontinuous trench 84 that is formed in bonding surface portion 77 inproximity to the periphery of second electronic chip 69. As shown inFIG. 8, first and second continuous trenches 81 and 84 share a commonportion or common trench portion 86, which is between first and secondelectronic chips 67 and 69. Common trench portion 86 allowsmanufacturers to place electronic chips 67 and 69 closer togethercompared to the embodiment shown in FIG. 6.

First and second continuous trenches 81 and 84 and common trench portion86 have curved sidewall surfaces (shown as curved surfaces 87 in FIG.7). Preferably, continuous trenches 81, 84 and 86 have substantiallycontinuously curved inner surfaces. In a preferred embodiment,continuous trenches 81, 84, and 86 have rounded corners as shown in FIG.8. Additionally, continuous trenches 81, 84, and 86 preferably have thesame depth and width characteristics as those described for continuoustrench 16. Alternatively, trench portion 86 has a different width thantrenches 81 and 84. By incorporating continuous trenches 81, 84 and 86,the benefits described with continuous trench 16 are realized.

FIG. 9 shows an enlarged partial cross-sectional view of an alternativeembodiment of an electronic device package 91 according to the presentinvention. Electronic device package 91 includes a support substrate orleadframe 93 having a flag or flag portion 94, which has a bondingsurface 96. An electronic chip 97 is attached to bonding surface 96 witha die attach layer 98. A continuous trench 101 is formed in flag 94 inproximity to electronic chip 97. Continuous trench 101 has the samecharacteristics as those described for continuous trench 16.

Electronic device package 91 further includes a trench or etched shape102 formed in flag 94 beneath electronic chip 97 and die attach layer98. That is, electronic chip 97 overlies trench 102. FIG. 10 shows a topview of flag 94, bonding surface 96, continuous trench 101, and trench102. In this embodiment, trench 102 is coupled or connected tocontinuous trench 101 at intersection points 103. Preferably, trench 102comprises a cross shape as shown in FIG. 10. Alternatively, secondtrench 102 has an “X” shape. In an alternative embodiment, a trench 104is formed in flag 94, but does not connect to continuous trench 101 asshown in FIG. 11.

Trenches or shapes 102 and 104 are formed in flag 94 using eitheretching or stamping techniques. Trenches 102 and 104 function, forexample, to collect flux used when electronic chip 97 is attached tobonding surface 96 with die attach layer 98 so that the flux does nothave to be expelled out from underneath electronic chip 97. Togetherwith continuous trench 101, this further reduces tilt and lateralmovement of electronic chip 97.

Turning now to FIGS. 12 and 13, a method for forming a continuous trenchaccording to the present invention is described. FIG. 12 shows anenlarged cross-sectional view of a support substrate or leadframe 113 ata stage of fabrication, and includes a bonding surface and deposited orattached masking layers 114 and 116. Masking layers 114 and 116comprise, for example, conventional photoresist materials or the like.Masking layer 114 is shown after an exposure and develop step, whichprovides an opening 117 in masking layer 114 to expose a portion ofbonding surface 118. The shape of opening 117 depends on, for example,the size of the electronic chip to be attached to leadframe 113 and thedesired spaced relationship of the electronic chip to the resultanttrench formed in leadframe 113.

FIG. 13 shows leadframe 113 after a trench 119 has been etched intobonding surface 118. Trench 119 preferably is etched using a jettedetchant (i.e., an impinging jet or directed flow etch) to provide asubstantially continuously curved inner surface. For example, whenleadframe 113 comprises copper, a ferric chloride etchant is used toform trench 119. Once trench 119 is formed, masking layers 114 and 116are removed, and leadframe 113 is ready for further processing.

Thus it is apparent that there has been provided, in accordance with thepresent invention, a structure and method for forming an electronicdevice package having a curved groove formed in a leadframe in proximityto an electronic chip. The curved groove provides, for example, a morereliable package by reducing the spread of die attach material fromunderneath the electronic chip. This reduces chip and package crackingproblems and improves encapsulant adhesion. Additionally, the curvedgroove allows manufacturers to place larger chips on given leadframes,and to place chips closer together in multi-chip applications.Furthermore, the continuous groove provides chip alignment benefits, amoisture barrier, and a mold lock. Moreover, the curved groove allowsmanufacturers to use thicker die attach layers thereby further reducingpackage related stresses.

Although the invention has been described and illustrated with referenceto specific embodiments thereof, it is not intended that the inventionbe limited to these illustrative embodiments. Those skilled in the artwill recognize that modifications and variations can be made withoutdeparting from the spirit of the invention. For example, where theauthors have referred to certain surfaces as upper or lower, suchreferences are reversed when package orientation is reversed.Additionally, although the authors have shown two chips in a multi-chipstructure, additional chips with or without additional curved groovescan be used. Moreover, although a groove with a square shape (FIG. 2) isshown, the groove shape preferably substantially follows the shape ofthe electronic chip used. For example, the groove shape is rectangular,elliptical, oval, circular, a polygon, or the like. Therefore, it isintended that this invention encompass all such variations andmodifications as fall within the scope of the appended claims.

1-42. (canceled)
 43. An electronic structure comprising: a flag having abonding surface; a first electronic device having a first peripheraledge coupled to the bonding surface with a first attach layer; a firstgroove for restricting flow of the first attach layer on the bondingsurface, wherein the first groove is formed in the bonding surfacesurrounding the first electronic device and extending only partiallyinto the flag, and wherein the first groove comprises a substantiallycontinuously curved inner surface and a first inner edge at the bondingsurface substantially aligned to the first peripheral edge, and whereinthe first attach layer terminates at approximately the first inner edge;a shaped trench formed in the bonding surface, wherein the firstelectronic device overlies at least a portion of the shaped trench; andan encapsulating layer covering portions of the flag, the firstelectronic device, and at least a portion of the substantiallycontinuously curved inner surface.
 44. The structure of claim 43 whereinthe shaped trench comprises a cross shape.
 45. The structure of claim 43wherein the shaped trench is connected to the first groove.
 46. Thestructure of claim 43 further comprising: a second electronic devicehaving a second peripheral edge coupled to the bonding surface with asecond attach layer; and a second groove formed in the bonding surfaceadjacent the second electronic device, wherein the second groovecomprises a substantially continuously curved inner surface and a secondinner edge in proximity to the second peripheral edge, and wherein thesecond attach layer terminates at approximately the second inner edge.47. The structure of claim 46, wherein the first and second grooves havea common portion.
 48. The structure of claim 46 wherein the second inneredge is substantially aligned with the second inner edge.
 49. Thepackage of claim 43, wherein the first groove has a width between aboutone hundred two microns and about three hundred thirty microns.
 50. Anelectronic device package comprising: a support substrate including aflag, wherein the flag has a bonding surface; a first electronic chiphaving a first peripheral edge, wherein the first electronic chip isattached to a first portion of the bonding surface with a first dieattach material; a first continuous trench for restricting flow of thefirst die attach material on the bonding surface, wherein the firstcontinuous trench is formed in the flag in proximity to the firstperipheral edge, and wherein the first continuous trench extends onlypartially into the flag, and wherein the first continuous trenchincludes a continuously rounded cross-sectional shape and a curvedsidewall surface, and wherein the first continuous trench surrounds thefirst electronic chip, and wherein the first die attach materialterminates at approximately the inner edge; and a shaped trench formedin the flag, wherein the first electronic chip overlies at least aportion of the shaped trench.
 51. The device of claim 50 furthercomprising: a second electronic chip having a second peripheral edge,wherein the second electronic chip is attached to a second portion ofthe bonding surface with a second die attach material; and a secondcontinuous trench for restricting flow of the second die attach materialon the bonding surface, wherein the second continuous trench is formedin the flag in proximity to the second peripheral edge, and wherein thesecond continuous trench includes a curved sidewall surface adjacent thesecond peripheral edge.
 52. The device of claim 51 wherein the first andsecond continuous trenches have a common portion.
 53. The device ofclaim 50, wherein the first continuous trench has a first inner edgesubstantially aligned to the first peripheral edge.
 54. The device ofclaim 50, wherein the first continuous trench has a width between aboutone hundred two microns and about three hundred thirty microns.
 55. Thedevice of claim 50, further comprising an encapsulant covering the firstelectronic chip and at least a portion of the curved sidewall surface.56. The device of claim 50, wherein the shaped trench comprises a crossshape.
 57. The device of claim 50 wherein the shaped trench is connectedto the first continuous trench.
 58. An electronic device packagecomprising: a support substrate including a flag, wherein the flag has abonding surface; a first electronic chip having a first peripheral edge,wherein the electronic chip is attached to a first portion of thebonding surface with a first die attach material; a first continuoustrench for restricting flow of the first die attach material on thebonding surface, wherein the first continuous trench is formed in theflag in proximity to the first peripheral edge, and wherein the firstcontinuous trench extends only partially into the flag, and wherein thefirst continuous trench includes a continuously rounded cross-sectionalshape, a curved sidewall surface, and a first inner edge substantiallyaligned to the first peripheral edge, and wherein the first continuoustrench surrounds the first electronic chip, and wherein the first dieattach material terminates at approximately the inner edge; a secondelectronic chip having a second peripheral edge, wherein the secondelectronic chip is attached to a second portion of the bonding surfacewith a second die attach material; a second continuous trench forrestricting flow of the second die attach material on the bondingsurface, wherein the second continuous trench is formed in the flag inproximity to the second peripheral edge, and wherein the secondcontinuous trench includes a curved sidewall surface adjacent the secondperipheral edge; and an encapsulant covering the first electronic chip,the second electronic chip, and at least a portion of the curvedsidewall surfaces.
 59. The device of claim 58, wherein the first andsecond continuous trenches have a common portion.
 60. The device ofclaim 58 further comprising a shaped trench formed in the flag, whereinthe first electronic chip overlies at least a portion of the shapedtrench.
 61. The device of claim 60, wherein the shaped trench comprisesa cross shape.
 62. The device of claim 58, wherein the second continuoustrench has a second inner edge substantially aligned to the secondperipheral edge.